Sputter yield is a crucial parameter in materials science and thin film research, describing the number of atoms ejected from a surface per incident ion during sputtering. It is influenced by factors such as the energy and mass of the ions, the angle of incidence, and the binding energy of the target material's surface atoms.

Sputter Yield

Materials science is an interdisciplinary field that focuses on understanding the properties, performance, and applications of materials by studying their structure and composition. It combines principles from physics, chemistry, and engineering to innovate and improve materials for technological advancements and industrial applications.

Materials Science

Thin film research

Number of atoms

Incident ion

Sputtering is a physical vapor deposition process used to deposit thin films by ejecting material from a target source onto a substrate. It is widely used in the semiconductor, optics, and materials science industries due to its ability to produce high-purity, uniform coatings at relatively low temperatures.

Sputtering

Energy of the ions

Mass of the ions

The angle of incidence is the angle between an incoming wave or ray and the perpendicular to the surface it encounters. It plays a crucial role in determining how waves, such as light or sound, are reflected or refracted at interfaces between different media.

Angle Of Incidence

Binding energy is the energy required to disassemble a whole system into separate parts, and it is a measure of the stability of a nucleus. It represents the energy equivalent of the mass defect, the difference between the mass of the nucleus and the sum of the masses of its constituent protons and neutrons.

Binding Energy

Target material refers to the specific substance or element that is subjected to a process or experiment, often to observe its reactions or properties under certain conditions. It plays a crucial role in fields like physics, chemistry, and materials science, where understanding its interactions can lead to advancements in technology and scientific knowledge.

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